Fampidirana ny wafer carrier
KATAGORY VOKATRA
▶Wafer Carrier System ho an'ny fizotran'ny PECVD & TALOX
• PECVD & TALOX Graphite Boat (M4~M12)
• Sambo SM mitsangana (M4, M6)
• Ampahany Graphite implant & douche (M4~M6)
• Lovia C/C & Coating Ceramic
• Metal RIE-Tray & Ceramic coating
• Vacuum Sealing : O-Ring & SQ-Ring
▶Fizotry ny Famindrana Texturing & Wet Etching
• LSC H-Carrier na kasety (M4~M12)
• LSC V-Carrier na kasety (M4~M12)
• ASC Carrier na kasety (M4, M6)
• W/F Carrier & Storage Box (M4~M12)
• Kodiarana fitaterana (Roller) Series
▶Mpitatitra sela solar & mpitatitra metaly
• TRC Carrier na kasety (M4~M12)
• Gazety (miaraka amin'ny BELT)
GRAPHITE BOAT (H-karazana)
19P6-216CT (WF M4~M12)
GRAPHITE BOAT (H-karazana)
21P6-240CT WF M4~M12)
GRAPHITE BOAT (H-karazana)
23P7-308CT(W/F M4~M12)
GRAPHITE BOAT (H-karazana)
22P/7-294TP (W/F M4~M12)
GRAPHITE BOAT (H-karazana)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & BOX FITORIANA (~M12)
C/C TRAY na CARRIER (M4~M10)
C/C TRAY na CARRIER (M4~M10)
Sambo mitsangana (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAPHITE-BOAT(M12)
Wafer Carrier System ho an'ny fizotran'ny PECVD
▶ GRAPHITE BOAT (CT-Design) M10/M12
• HEVITRA DESIGN MANOKANA
▶ GRAPHITE BOAT (CT-Design) M4/M6 Process
▶ Sambo kojakoja fanampiny
▶ SABOTSY VERTICAL-161.7mm WAFER
▶ SABOTSY VERTICAL-166mm WAFER
▶ SABOTSY VERTICAL-161.7mm, WAFER 166mm
Mpitatitra sela solar & mpitatitra metaly TRC
TYPE: Automation
Haben'ny WAFER : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
FAMPIASANA: Mitondra (Kasety)
CAPACITY: 100 takelaka
Haavo: 4.76mm/5.953mm/6.35mm
Haben'ny: 559×220×220MM
Tokony ho 712 × 260 × 260 MM
TOMBONY : Atmosfera
MATERIAL: LEFO, SIDE BAR-Aluminium (anodizing)
SIDE PLATE-POM (Antistatic)
Saron'ny bara ambany-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
LOLIVITRA & IMPLANT, CARRIER
