Silicon carbide (SiC) tokana kristaly fitaovana manana bandy lehibe hantsana sakan'ny (~ Si 3 heny), avo mafana conductivity (~ Si 3.3 heny na GaAs in-10), avo electron saturation tahan'ny fifindra-monina (~ Si 2.5 fotoana), avo fahatapahana herinaratra saha (~ Si in-10 na GaAs in-5) sy ireo toetra miavaka hafa.
Ny fitaovana SiC dia manana tombony tsy azo soloina eo amin'ny sehatry ny mari-pana ambony, ny fanerena avo lenta, ny matetika, ny fitaovana elektronika mahery vaika ary ny fampiharana ara-tontolo iainana tafahoatra toy ny aerospace, miaramila, angovo nokleary, sns. fampiharana, ary lasa lasa mahazatra ny semiconductor herinaratra.
4H-SiC Silicon carbide substrate famaritana
Item项目 | Specifications参数 | |
Polytype | 4H -SiC | 6H- SiC |
savaivony | 2 inch | 3 inch | 4 inch | 6 santimetatra | 2 inch | 3 inch | 4 inch | 6 santimetatra |
hateviny | 330 μm ~ 350 μm | 330 μm ~ 350 μm |
Conductivity | N - karazana / Semi-insulating | N - karazana / Semi-insulating |
Dopant | N2 (Nitrogen)V (Vanadium) | N2 (Nitrogen) V (Vanadium) |
Orientation | Amin'ny axis <0001> | Amin'ny axis <0001> |
Resistivity | 0,015 ~ 0,03 ohm-cm | 0,02 ~ 0,1 ohm-cm |
Micropipe Density (MPD) | ≤10/cm2 ~ ≤1/cm2 | ≤10/cm2 ~ ≤1/cm2 |
TTV | ≤ 15 μm | ≤ 15 μm |
Bow / Warp | ≤25 μm | ≤25 μm |
Surface | DSP/SSP | DSP/SSP |
kilasy | Famokarana / fikarohana | Famokarana / fikarohana |
Crystal Stacking Sequence | ABCB | ABCABC |
Paramètre lattice | a=3.076A , c=10.053A | a=3.073A , c=15.117A |
Eg/eV(Gap-gap) | 3.27 eV | 3.02 eV |
ε(Dielectric Constant) | 9.6 | 9.66 |
Fanondroana refraction | n0 =2.719 ne =2.777 | n0 =2.707 , ne =2.755 |
6H-SiC Silicon Carbide famaritana substrate
Item项目 | Specifications参数 |
Polytype | 6H-SiC |
savaivony | 4 inch | 6 santimetatra |
hateviny | 350μm ~ 450μm |
Conductivity | N - karazana / Semi-insulating |
Dopant | N2 (Nitrogène) |
Orientation | <0001> miala 4°± 0.5° |
Resistivity | 0,02 ~ 0,1 ohm-cm |
Micropipe Density (MPD) | ≤ 10/cm2 |
TTV | ≤ 15 μm |
Bow / Warp | ≤25 μm |
Surface | Si Face: CMP, Epi-Ready |
kilasy | Naoty fikarohana |